Matrix Integrated Systems, Inc.
Source: Matrix Integrated Systems, Inc.
Matrix designs, manufactures, sells and services
plasma based dry photoresist ashers (strippers),
isotropic etchers, chemical
downstream etchers (CDE) and integrated systems
for bulk photoresist removal, high-dose implanted
resist removal, Oxide etch, Nitride etch, Titanium
etch, post-etch
polymer removal, low-K dielectric material
processing, wafer bump fabrication and other
cleaning and surface preparation processes
necessary for the fabrication of integrated
circuits (ICs) and thin film read-write heads
(TFH) for disk drives.
The Matrix Cheetah 200™ and Jaguar 300™ Bobcat 200™ and Panther 300™ combine proven Matrix process technology with cost of ownership performance that is unequalled by any other 200mm or 300mm tool in the marketplace today.
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